Anti-Reflection Coating Application of SixOy-SixNyStacked-Layer Fabricated by Reactive Sputtering
نویسندگان
چکیده
منابع مشابه
An Anti-Reflection Coating for Silicon Optics at Terahertz Frequencies
A method for reducing the reflections from silicon optics at terahertz frequencies has been investigated. In this study, we used thin films of parylene as an anti-reflection (AR) layer for silicon optics and show low-loss behavior well above 1 THz. Transmittance spectra are acquired on double-sided-parylene-coated, high-resistivity, single-crystal silicon etalons between 0.45 THz and 2.8 THz. M...
متن کاملAnti-Reflection Coating for Nitrogen-Vacancy Optical Measurements in Diamond
We realize anti-reflection (AR) coatings for optical excitation and fluorescence measurements of nitrogen-vacancy (NV) color centers in bulk diamond by depositing quarter-wavelength thick silica layers on the diamond surface. These AR coatings improve NV-diamond optical measurements by reducing optical reflection at the diamond-air interface from 17% to 2%, which allows more effective NV optica...
متن کاملDesign of Silicon Nano-Bars Anti-Reflection Coating to Enhance Thin Film Solar Cells Efficiency
In this paper a novel anti-reflection (AR) coating based on silicon nano-bars is designed and its impact on the performance of crystalline silicon (c-Si) thin-film solar cells is extensively studied. Silicon nano-bars with optimized size and period are embedded on top of the active layer, under a 100nm Si3N4 layer. As a result of the proposed layer stack, an inhomogeneous intermediate layer wit...
متن کاملHigh coercivity SmFeAlC thin films fabricated by multilayer sputtering
Multilayer sputtering of SmFe/C(Al) plus appropriate thermal processing has been used to fabricate SmFeC thin films with A1 substitution for Fe. It was found that the SmFeAlC thin films exhibited exceptionally high Coercivities. A coercivity of 28 kOe was realized for the thin film with structure of Ta( l000~) / lSmFe(40~~/ G(Al)(5,&)]~50/Ta(200@ with subsequent annealing at 650°C.
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
ژورنال
عنوان ژورنال: Journal of the Korean Vacuum Society
سال: 2010
ISSN: 1225-8822
DOI: 10.5757/jkvs.2010.19.5.341